A robust control method for electrostatic microbeam dynamic shaping with capacitive detection
نویسندگان
چکیده
منابع مشابه
A robust control method for electrostatic microbeam dynamic shaping with capacitive detection
A robust closed-loop control and observation methodology for an electrostatic dynamic shaping of a microbeam using N small separate electrodes is described. After decomposing the displacements vector on the n eigenmodes using the modal analysis, n controllers are designed to control the dynamic coefficients of each mode and thus to deliver the stresses that must be distributed throughout the be...
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ژورنال
عنوان ژورنال: IFAC Proceedings Volumes
سال: 2008
ISSN: 1474-6670
DOI: 10.3182/20080706-5-kr-1001.00096